ASTM F863-84(1992)E01

Practice for Detection of Defects in Spin-Coated Resist (Withdrawn 1996)

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The information about the standard:

Designation standards: ASTM F863-84(1992)E01
Note: WITHDRAWN
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: American technical standard
Category: Technical standards ASTM