ASTM F907-85(1992)

Test Method for Measurement of Rotational Acceleration of a Wafer for Photoresist Spin Coating (Withdrawn 1997)

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The information about the standard:

Designation standards: ASTM F907-85(1992)
Note: WITHDRAWN
Approximate weight : 300 g (0.66 lbs)
Country: American technical standard
Category: Technical standards ASTM