ASTM F907-85E01R92

Test Method for Measurement of Rotational Acceleration of a Wafer for Photoresist Spin Coating

STANDARD published on 1.1.1996

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The information about the standard:

Designation standards: ASTM F907-85E01R92
Note: WITHDRAWN
Publication date standards: 1.1.1996
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM