ASTM F928-02

Standard Test Methods for Edge Contour of Circular Semiconductor Wafers and Rigid Disk Substrates (Withdrawn 2003)

STANDARD published on 10.1.2002

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The information about the standard:

Designation standards: ASTM F928-02
Note: WITHDRAWN
Publication date standards: 10.1.2002
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F928-02 :

Keywords:
contour, edge contour, gallium arsenide, optical comparator, projection microscope, rigid disk, semiconductor, silicon, wafer, ICS Number Code 29.045 (Semiconducting materials)