ASTM F951-02

Standard Test Method for Determination of Radial Interstitial Oxygen Variation in Silicon Wafers (Withdrawn 2003)

STANDARD published on 10.1.2002

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The information about the standard:

Designation standards: ASTM F951-02
Note: WITHDRAWN
Publication date standards: 10.1.2002
The number of pages: 5
Approximate weight : 15 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F951-02 :

Keywords:
infrared transmission, interstitial oxygen, oxygen, radial variation, silicon, uniformity, variation, ICS Number Code 29.045 (Semiconducting materials)