Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer

The information about the standard:

Designation standards: ASTM E2246-11
Note: WITHDRAWN
Publication date standards: 1.11.2011
The number of pages: 21
Approximate weight : 63 g (0.14 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM E2246-11 :

Keywords:
cantilevers, combined standard uncertainty, fixed-fixed beams, interferometry, length measurements, microelectromechanical systems, MEMS, polysilicon, residual strain, round robin, stiction, strain gradient, test structure, Alignment, Calibration--metals/alloys analysis instrumentation, Cantilever testing, Combined standard uncertainty, Fixed-fixed beams, Interferograms/Interferometry, Length, Microelectromechanical systems (MEMS), Noncontacting optical strain measurement systems