ASTM E986-04(2010)

Standard Practice for Scanning Electron Microscope Beam Size Characterization

STANDARD published on 1.4.2010

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The information about the standard:

Designation standards: ASTM E986-04(2010)
Note: WITHDRAWN
Publication date standards: 1.4.2010
The number of pages: 3
Approximate weight : 9 g (0.02 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM E986-04(2010) :

Keywords:
electron beam size, E766, graphite fiber, magnification, NIST-SRM 2069B, resolution, SEM, SEM performance, spot size, waveform, Electron microscopy, Scanning electron microscope (SEM), ICS Number Code 31.120 (Electronic display devices), 37.020 (Optical equipment)