ASTM F1394-92(2012)

Standard Test Method for Determination of Particle Contribution from Gas Distribution System Valves

STANDARD published on 1.7.2012

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The information about the standard:

Designation standards: ASTM F1394-92(2012)
Note: WITHDRAWN
Publication date standards: 1.7.2012
The number of pages: 27
Approximate weight : 81 g (0.18 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1394-92(2012) :

Keywords:
condensation nucleus center, contamination, gas distribution, gas distribution valves, isokinetic sampling, nitrogen, particle contamination, particle counter, particles, semiconductor processing, ICS Number Code 23.060.20 (Ball and plug valves), 23.060.10 (Globe valves)