ASTM F1513-99(2011)

Standard Specification for Pure Aluminum (Unalloyed) Source Material for Electronic Thin Film Applications (Withdrawn 2020)

STANDARD published on 1.6.2011

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The information about the standard:

Designation standards: ASTM F1513-99(2011)
Note: WITHDRAWN
Publication date standards: 1.6.2011
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1513-99(2011) :

Keywords:
aluminum, coating, evaporation, sputtering, targets, thin films, vacuum coating, Aluminum electrical conductors (semiconductors), Electronic materials/applications--specifications, Electronic thin-film applications--specifications, Evaporators/evaporation--specifications, Sputtering process/targets--specifications, Targets, Vacuum electronic applications, ICS Number Code 31.200 (Integrated circuits. Microelectronics)