Standard Test Method for Measuring Boron Contamination in Heavily Doped N-Type Silicon Substrates by Secondary Ion Mass Spectrometry (Withdrawn 2003)
STANDARD published on 10.12.1999
Designation standards: ASTM F1528-94(1999)
Note: WITHDRAWN
Publication date standards: 10.12.1999
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
boron, epitaxial substrate, silicon, SIMS, ICS Number Code 29.045 (Semiconducting materials)