ASTM F1529-02

Standard Test Method for Sheet Resistance Uniformity Evaluation by In-Line Four-Point Probe with the Dual-Configuration Procedure

STANDARD published on 10.12.2002

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The information about the standard:

Designation standards: ASTM F1529-02
Note: WITHDRAWN
Publication date standards: 10.12.2002
The number of pages: 13
Approximate weight : 39 g (0.09 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1529-02 :

Keywords:
epitaxy, four-point probe, ion implant, metallization, polysilicon, sheet resistance, silicon, ICS Number Code 29.045 (Semiconducting materials)