ASTM F1530-02

Standard Test Method for Measuring Flatness, Thickness, and Thickness Variation on Silicon Wafers by Automated Noncontact Scanning (Withdrawn 2003)

STANDARD published on 10.12.2002

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The information about the standard:

Designation standards: ASTM F1530-02
Note: WITHDRAWN
Publication date standards: 10.12.2002
The number of pages: 12
Approximate weight : 36 g (0.08 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1530-02 :

Keywords:
flatness, noncontact measurement, semiconductor, silicon, thickness, thickness variation, wafers, ICS Number Code 29.045 (Semiconducting materials)