ASTM F3166-16

Standard Specification for High-Purity Titanium Sputtering Target Used for Through-Silicon Vias (TSV) Metallization (Withdrawn 2023)

STANDARD published on 1.5.2016

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The information about the standard:

Designation standards: ASTM F3166-16
Note: WITHDRAWN
Publication date standards: 1.5.2016
The number of pages: 5
Approximate weight : 15 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F3166-16 :

Keywords:
high-purity titanium, sputtering target, TSV metallization,, ICS Number Code 25.220.40 (Metallic coatings)