BS EN 62047-10:2011

Semiconductor devices. Micro-electromechanical devices. Micro-pillar compression test for MEMS materials.

STANDARD published on 30.9.2011

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The information about the standard:

Designation standards: BS EN 62047-10:2011
Publication date standards: 30.9.2011
The number of pages: 18
Approximate weight : 54 g (0.12 lbs)
Country: British technical standard
Category: Technical standards BS

Annotation of standard text BS EN 62047-10:2011 :

ISBN: 978 0 580 69447 9 Status: Definitive