BS EN 62047-11:2013

Semiconductor devices. Micro-electromechanical devices. Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems.

STANDARD published on 31.10.2013

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The information about the standard:

Designation standards: BS EN 62047-11:2013
Publication date standards: 31.10.2013
The number of pages: 24
Approximate weight : 72 g (0.16 lbs)
Country: British technical standard
Category: Technical standards BS

Annotation of standard text BS EN 62047-11:2013 :

ISBN: 978 0 580 69448 6 Status: Definitive