
Semiconductor devices. Micro-electromechanical devices. Tensile testing method of thin film materials.
STANDARD published on 30.11.2006
Designation standards: BS EN 62047-2:2006
Publication date standards: 30.11.2006
The number of pages: 16
Approximate weight : 48 g (0.11 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 0 580 49740 2 Status: Definitive