BS EN 62047-21:2014

Semiconductor devices. Micro-electromechanical devices. Test method for Poisson´s ratio of thin film MEMS materials.

STANDARD published on 31.10.2014

The information about the standard:

Designation standards: BS EN 62047-21:2014
Publication date standards: 31.10.2014
The number of pages: 18
Approximate weight : 54 g (0.12 lbs)
Country: British technical standard
Category: Technical standards BS