
Semiconductor devices. Micro-electromechanical devices. Axial fatigue testing methods of thin film materials.
STANDARD published on 30.4.2010
Designation standards: BS EN 62047-6:2010
Publication date standards: 30.4.2010
The number of pages: 20
Approximate weight : 60 g (0.13 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 978 0 580 58544 9 Status: Definitive