
Semiconductor devices. Micro-electromechanical devices. Four-point bending test method for interfacial adhesion energy of layered MEMS materials.
STANDARD published on 17.4.2019
Designation standards: BS IEC 62047-31:2019
Publication date standards: 17.4.2019
The number of pages: 16
Approximate weight : 48 g (0.11 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 978 0 580 96660 6 Status: Definitive