
Semiconductor devices. Micro-electromechanical devices. Test method for the nonlinear vibration of MEMS resonators.
STANDARD published on 29.1.2019
Designation standards: BS IEC 62047-32:2019
Publication date standards: 29.1.2019
The number of pages: 22
Approximate weight : 66 g (0.15 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 978 0 580 97389 5 Status: Definitive