
Semiconductor devices. Micro-electromechanical devices. Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever.
STANDARD published on 24.10.2022
Designation standards: BS IEC 62047-42:2022
Publication date standards: 24.10.2022
The number of pages: 24
Approximate weight : 72 g (0.16 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 978 0 539 16581 4 Status: Definitive