
Semiconductor devices. Micro-electromechanical devices. Silicon based MEMS fabrication technology. Measurement method of impact resistance of nanostructures.
STANDARD published on 1.4.2025
Designation standards: BS IEC 62047-45:2025
Publication date standards: 1.4.2025
The number of pages: 18
Approximate weight : 54 g (0.12 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 978 0 539 21849 7 Status: Definitive