
Semiconductor devices. Micro-electromechanical devices. Temperature and humidity test methods for piezoelectric MEMS cantilevers.
STANDARD published on 3.12.2025
Designation standards: BS IEC 62047-49:2025
Publication date standards: 3.12.2025
The number of pages: 14
Approximate weight : 42 g (0.09 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 978 0 539 30372 8 Status: Definitive