
Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices. Classification of defects.
STANDARD published on 10.5.2019
Designation standards: BS IEC 63068-1:2019
Publication date standards: 10.5.2019
The number of pages: 26
Approximate weight : 78 g (0.17 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 978 0 580 96413 8 Status: Definitive