
Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices. Test method for defects using optical inspection.
STANDARD published on 8.2.2019
Designation standards: BS IEC 63068-2:2019
Publication date standards: 8.2.2019
The number of pages: 28
Approximate weight : 84 g (0.19 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 978 0 580 51374 9 Status: Definitive