BS IEC 63068-4:2022

Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices. Procedure for identifying and evaluating defects using a combined method of optical inspection and photoluminescence.

STANDARD published on 7.9.2022

The information about the standard:

Designation standards: BS IEC 63068-4:2022
Publication date standards: 7.9.2022
The number of pages: 28
Approximate weight : 84 g (0.19 lbs)
Country: British technical standard
Category: Technical standards BS