
Surface chemical analysis. Secondary-ion mass spectrometry. Determination of boron atomic concentration in silicon using uniformly doped materials.
STANDARD published on 15.4.2000
Designation standards: BS ISO 14237:2000
Note: WITHDRAWN
Publication date standards: 15.4.2000
The number of pages: 32
Approximate weight : 96 g (0.21 lbs)
Country: British technical standard
Category: Technical standards BS