
Microbeam analysis. Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA).
STANDARD published on 22.2.2021
Designation standards: BS ISO 15632:2021
Publication date standards: 22.2.2021
The number of pages: 22
Approximate weight : 66 g (0.15 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 978 0 539 04693 9 Status: Under Review