Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting.
STANDARD published on 31.3.2013
Designation standards: BS ISO 16413:2013
Note: WITHDRAWN
Publication date standards: 31.3.2013
The number of pages: 42
Approximate weight : 126 g (0.28 lbs)
Country: British technical standard
Category: Technical standards BS