
Tracked Changes. Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter dept profiling using single and multi-layer thin films.
STANDARD published on 3.1.2023
Designation standards: BS ISO 17109:2022-TC
Publication date standards: 3.1.2023
The number of pages: 68
Approximate weight : 204 g (0.45 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 978 0 539 24254 6 Status: Definitive