BS ISO 21466:2019

Microbeam analysis. Scanning electron microscopy. Method for evaluating critical dimensions by CDSEM.

STANDARD published on 18.12.2019

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The information about the standard:

Designation standards: BS ISO 21466:2019
Publication date standards: 18.12.2019
The number of pages: 56
Approximate weight : 168 g (0.37 lbs)
Country: British technical standard
Category: Technical standards BS

Annotation of standard text BS ISO 21466:2019 :

ISBN: 978 0 580 94840 4 Status: Confirmed