BS ISO 21859:2019

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment.

STANDARD published on 19.6.2019

The information about the standard:

Designation standards: BS ISO 21859:2019
Publication date standards: 19.6.2019
The number of pages: 12
Approximate weight : 36 g (0.08 lbs)
Country: British technical standard
Category: Technical standards BS