
Surface chemical analysis. Depth profiling. Non-destructive depth profiling of nanoscale heavy metal oxide thin films on Si substrates with medium energy ion scattering.
STANDARD published on 3.8.2022
Designation standards: BS ISO 23170:2022
Publication date standards: 3.8.2022
The number of pages: 38
Approximate weight : 114 g (0.25 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 978 0 539 14473 4 Status: Definitive