
Atomic layer deposition. Vocabulary.
STANDARD published on 17.11.2023
Designation standards: BS ISO 8181:2023
Publication date standards: 17.11.2023
The number of pages: 18
Approximate weight : 54 g (0.12 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 978 0 539 19026 7 Status: Definitive