Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
STANDARD published on 1.4.2007
Designation standards: ČSN EN 62047-1
Classification mark: 358775
Catalog number: 78083
Note: WITHDRAWN
Publication date standards: 1.4.2007
The number of pages: 24
Approximate weight : 72 g (0.16 lbs)
Country: Czech technical standard
Category: Technical standards ČSN