Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials (IEC 62047-6:2009)
STANDARD published on 1.11.2010
Designation standards: ČSN EN 62047-6
Classification mark: 358775
Catalog number: 86158
Publication date standards: 1.11.2010
The number of pages: 24
Approximate weight : 72 g (0.16 lbs)
Country: Czech technical standard
Category: Technical standards ČSN