Ellipsometry - Principles
STANDARD published on 1.4.2023
Designation standards: ČSN EN ISO 23131
Classification mark: 039050
Catalog number: 516600
Publication date standards: 1.4.2023
The number of pages: 28
Approximate weight : 84 g (0.19 lbs)
Country: Czech technical standard
Category: Technical standards ČSN
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3