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ČSN EN ISO 25178-603 (014451)

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments

STANDARD published on 1.8.2025

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The information about the standard:

Designation standards: ČSN EN ISO 25178-603
Classification mark: 014451
Catalog number: 521667
Publication date standards: 1.8.2025
The number of pages: 32
Approximate weight : 96 g (0.21 lbs)
Country: Czech technical standard
Category: Technical standards ČSN

Annotation of standard text ČSN EN ISO 25178-603 (014451):

This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements