Geometrical product specifications (GPS) - Surface texture: Areal - Part 606: Design and characteristics of non-contact (focus variation) instruments
STANDARD published on 1.10.2026
Designation standards: ČSN EN ISO 25178-606
Classification mark: 014451
Catalog number: 524415
Publication date standards: 1.10.2026
The number of pages: 32
Approximate weight : 96 g (0.21 lbs)
Country: Czech technical standard
Category: Technical standards ČSN
This document specifies the design and characteristics of focus variation instruments for areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements as well.
This document applies to focus variation without pattern illumination or with fixed pattern illumination. This document does not cover methods using varying pattern illumination during the measurement