Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
STANDARD published on 1.4.2023
Designation standards: ČSN EN ISO 23216
Classification mark: 039051
Catalog number: 516601
Publication date standards: 1.4.2023
The number of pages: 20
Approximate weight : 60 g (0.13 lbs)
Country: Czech technical standard
Category: Technical standards ČSN
This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane. It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others. It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes