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DIN 32564-1:2004-05

Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology.

STANDARD published on 1.5.2004

German -
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The information about the standard:

Designation standards: DIN 32564-1:2004-05
Publication date standards: 1.5.2004
The number of pages: 6
Approximate weight : 18 g (0.04 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN 32564-1:2004-05 :

Fertigungsmittel für Mikrosysteme - Begriffe - Teil 1: Allgemeine Begriffe der Mikrosystemtechnik.