Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology.
STANDARD published on 1.5.2004
Designation standards: DIN 32564-1:2004-05
Publication date standards: 1.5.2004
The number of pages: 6
Approximate weight : 18 g (0.04 lbs)
Country: German technical standard
Category: Technical standards DIN
Fertigungsmittel für Mikrosysteme - Begriffe - Teil 1: Allgemeine Begriffe der Mikrosystemtechnik.