DIN 32567-5:2015-06

Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 5: Derivation of correction values for optical measuring devices.

STANDARD published on 1.6.2015

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The information about the standard:

Designation standards: DIN 32567-5:2015-06
Publication date standards: 1.6.2015
The number of pages: 18
Approximate weight : 54 g (0.12 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN 32567-5:2015-06 :

Fertigungsmittel für Mikrosysteme - Ermittlung von Materialeinflüssen auf die optische und taktile dimensionelle Messtechnik - Teil 5: Ableitung von Korrekturwerten für optische Messgeräte.