DIN 50450-9:2003-04

Testing of materials for semiconductor technology - Determination of impurities in carrier gases and dopant gases - Part 9: Determination of oxygen, nitrogen, carbonmonoxide, carbondioxide, hydrogen and C1-C3-hydrocarbons in gaseous hydrogen chloride by gaschromatography.

STANDARD published on 1.4.2003

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The information about the standard:

Designation standards: DIN 50450-9:2003-04
Note: WITHDRAWN
Publication date standards: 1.4.2003
The number of pages: 5
Approximate weight : 15 g (0.03 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN 50450-9:2003-04 :

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Verunreinigungen in Träger - und Dotiergasen - Teil 9: Bestimmung von Sauerstoff, Stickstoff, Kohlenstoffmonooxid, Kohlenstoffdioxid, Wasserstoff und C1-C3-Kohlenwasserstoffen in Chlorwasserstoff mit Gaschromatographie.