Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 2: Calcium (Ca), cobalt (Co), chromium (Cr), copper (Cu), Iron (Fe), nickel (Ni) and zinc (Zn) in hydrofluoric acid with plasma-induced emission spectroscopy.
STANDARD published on 1.4.2003
Designation standards: DIN 50451-2:2003-04
Note: WITHDRAWN
Publication date standards: 1.4.2003
The number of pages: 8
Approximate weight : 24 g (0.05 lbs)
Country: German technical standard
Category: Technical standards DIN
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 2: Calcium (Ca), Cobalt (Co), Chrom (Cr), Kupfer (Cu), Eisen (Fe), Nickel (Ni) und Zink (Zn) in Flusssäure mittels Plasma-angeregter Emissionsspektrometrie.