DIN 50451-3:2003-04

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Aluminium (Al), cobalt (Co), copper (Cu), sodium (Na), nickel (Ni) and zinc (Zn) in nitric acid by ICP-MS.

STANDARD published on 1.4.2003

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The information about the standard:

Designation standards: DIN 50451-3:2003-04
Note: WITHDRAWN
Publication date standards: 1.4.2003
The number of pages: 8
Approximate weight : 24 g (0.05 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN 50451-3:2003-04 :

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 3: Aluminium (Al), Cobalt (Co), Kupfer (Cu), Natrium (Na), Nickel (Ni) und Zink (Zn) in Salpetersäure mittels ICP-MS.