DIN 50455-1:2009-10

Testing of materials for semiconductor technology - Methods for characterizing photoresists - Part 1: Determination of coating thickness with optical methods.

STANDARD published on 1.10.2009

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The information about the standard:

Designation standards: DIN 50455-1:2009-10
Publication date standards: 1.10.2009
The number of pages: 8
Approximate weight : 24 g (0.05 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN 50455-1:2009-10 :

Prüfung von Materialien für die Halbleitertechnologie - Verfahren zur Charakterisierung von Fotolacken - Teil 1: Bestimmung der Schichtdicke mit optischen Messverfahren.