DIN 32566:2007-12

Production equipment for microsystems - Specification for an X-Ray Lithography Mask Support Ring.

STANDARD published on 1.12.2007

The information about the standard:

Designation standards: DIN 32566:2007-12
Publication date standards: 1.12.2007
The number of pages: 9
Approximate weight : 27 g (0.06 lbs)
Country: German technical standard
Category: Technical standards DIN