Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of methane impurity in H2, O2, N2, Ar and He by using a flame ionization detector (FID).
STANDARD published on 1.3.1991
Designation standards: DIN 50450-3:1991-03
Note: WITHDRAWN
Publication date standards: 1.3.1991
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: German technical standard
Category: Technical standards DIN
Prüfung von Materialien für die Halbleitertechnologie; Bestimmung von Verunreinigungen in Träger- und Dotiergasen; Bestimmung von Methanverunreinigungen in Wasserstoff, Sauerstoff, Stickstoff, Argon und Helium mit einem Flammenionisationsdetektor (FID).