DIN 51456:2013-10

Testing of materials for semiconductor technology - Surface analysis of silicon wafers by multielement determination in aqueous analysis solutions using mass spectrometry with inductively coupled plasma (ICP-MS).

STANDARD published on 1.10.2013

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The information about the standard:

Designation standards: DIN 51456:2013-10
Publication date standards: 1.10.2013
The number of pages: 15
Approximate weight : 45 g (0.10 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN 51456:2013-10 :

Prüfung von Materialien für die Halbleitertechnologie - Oberflächenanalyse von Silicium-Halbleiterscheiben (Wafer) durch Multielementbestimmung in wässrigen Analysenlösungen mittels Massenspektrometrie mit induktiv gekoppeltem Plasma (ICP-MS).