Semiconductor devices - Micro-electromechanical devices - Part 15: Test method of bonding strength between PDMS and glass.
STANDARD published on 1.1.2016
Designation standards: DIN EN 62047-15:2016-01
Note: WITHDRAWN
Publication date standards: 1.1.2016
The number of pages: 13
Approximate weight : 39 g (0.09 lbs)
Country: German technical standard
Category: Technical standards DIN
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 15: Prüfverfahren zur Bondqualität zwischen PDMS und Glas.